日本YAMATO等離子清洗機PR300/301

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日本YAMATO等離子清洗機PR300/301：

Low Temperature Asher

PR300/PR301

Model
300	301
Method
Barrel type of DP DP : direct plasma
High-frequency Output
Max.300W
Oscillating Frequency
13.56MHz
Reaction Chamber
?64×160mm 3 chambers	?118×160mm 1 chamber

The PR 300 isagasplasma device that is used widely for suchapplicationsasproduction of semiconductors and analysis work.Itboastsoutstanding operabi lity and safety, with anautomatictuningsystem as a standard component and other features.It has acompactdesign, with a small-size HF generator and anoscillationsectionintegrated with a portion of the chamber,allowing it tobeinstalled into a 19-inch rack.

Three 64mm diameterchambersareincluded. (PR300)
The unit can be set for awiderangeof output conditions to handle a variety oftestingsamples.
One 118mm diameter largechamberisaccommodated.

The gas plasmaequipment has a wide range ofapplications fromashing, etching,dry cleaning,etc.

Reaction Chamber

Control Panel

Operation Flowchart

Piping System Diagram (PR300)

Specifications

Model	PR300	PR301
Method	Barrel type of direct plasma
Controlpart
Highfrequency output	300Wvariable (100W×3 chambers)
Oscillating frequency	13.56MHz
Outputimpedance	50Ω
Tuningmethod	Manual biaxial tuning method
Instrument	Output watt meter (0 to 300W) Reflected wave watt meter (0 to 100W) Vacuum gauge, bourdon's tube type Flow meter, needle valve integrated type, 1 set
Timer	0.1sec. to 999h
Gasinlet	1/4"stainless steel
Powersource (50/60Hz)	AC100/220V, single phase, 1 kVA
Reactionpart
Reactionchamber	Made ofsuperhardglass, ?64×160mm×3 chanbers	Madeofpyrexglass, ?118×160mm
Electrodestructure	Condenser type, 2-way split
Controlsystem	Autopressure reduction, auto leak valve
Pipingmaterial	Stailesssteel,Teflon, Copper and Brass	Stainlesssteel,Teflon
Externaldimensions(W×D×Hmm)	438×520×556	438×520×656
Weight	Approx.38kg	Approx. kg
StandardAccessories
	Vacuum grease :1 container O-ring for reactionchamber:6pcs. Sample dish (large andsmall):each4sets Lid for reactionchamber:4sets Adapter for ground:1pc.
OptionalAccessories
Sample dish(large) Sample dish (small) Sample shelf Stand