| 波長 | Si detector: 190 to 1150 nm InGaAs detector: 650 to 1800 nm Si + InGaAs detectors: 190 to 1800 nm Si + InGaAs (extended) detectors: 190 to 2300 or 2500 nm |
| 可測光斑尺寸 | Si detector: 5 µm to 4 mm, to 2 µm in Knife-Edge mode InGaAs detector: 10 µm to 3 mm, to 2 µm in Knife-Edge mode InGaAs (extended) detector: 10 µm to 2 mm, to 2 µm in Knife-Edge mode |
| 平面間距 (4XY) | 100 µm: -100, 0, +100, +400 µm 250 µm: -250, 0, +250, +1000 µm 500 µm: -500, 0, +500, +2000 µm 750 µm: -750, 0, +750, +3000 µm |
| 平面間距 (3XYKE) | 50 µm: -50, 0, +50, 0 µm 100 µm: -100, 0, +100, 0 µm |
| 光斑束腰直徑測量 | Second moment (4s) diameter to ISO 11146; Fitted Gaussian & TopHat 1/e2 (13.5%) width User selectable % of peak Knife-Edge mode* for very small beams |
| 光斑束腰位置測量 | ± 20 µm best in X, Y, and Z — contact DataRay for recommendation |
| 可測光源 | CW; Pulsed lasers, F µm = [500/(PRR in kHz)] |
| 分辨率/精度 | 0.1 µm or 0.05% of scan range ± < 2%="" ±="0.5"> |
| M2 測量 | 1 to > 20, ± 5% |
| 發(fā)散角/準直,指向性 | 1 mrad best — contact DataRay for recommendation |
| 功率 & 輻照度 | 1 W Total & 0.5 mW/µm2 |
| 增益范圍 | 1,000:1 Switched 4,096:1 ADC range |
| 顯示圖形 | X-Y-Z Position & Profiles, Zoom x1 to x16 |
| 更新速率 | ~5 Hz |
| XY輪廓和質(zhì)心 | Beam Wander display and logging |
| 電腦硬件要求 | Windows, 2 GB RAM, USB 2.0/3.0 port |